Sub test()
Dim arr&(1 To 2324784, 1 To 6)
Dim n1&, n2&, n3&, n4&, n5&, n6&
Dim counter&
 
For n1 = 1 To 37
For n2 = n1 + 1 To 37
For n3 = n2 + 1 To 37
For n4 = n3 + 1 To 37
For n5 = n4 + 1 To 37
For n6 = n5 + 1 To 37
    counter = counter + 1
    arr(counter, 1) = n1
    arr(counter, 2) = n2
    arr(counter, 3) = n3
    arr(counter, 4) = n4
    arr(counter, 5) = n5
    arr(counter, 6) = n6
Next: Next: Next: Next: Next: Next
Range("A1").Resize(counter, 6).Value = arr
End Sub